Experience
Jury decision upheld by Federal Circuit for DuPont Air Products NanoMaterials
DuPont Air Products NanoMaterials, LLC
Cabot Micro
The U.S. Court of Appeals for the Federal Circuit upheld a jury decision in the U.S. District Court for the District of Arizona in favor of Finnegan client DuPont Air Products NanoMaterials, LLC (DA NanoMaterials), holding that various tungsten Chemical Mechanical Planarization (CMP) slurries sold by DA Nanomaterials do not infringe Cabot Microelectronic’s patents. Tungsten CMP is a process used in semiconductor manufacturing.
DuPont Air Products NanoMaterials, LLC v. Cabot Micro, 11-1085, -1088, Fed. Cir., Judges Rader, Dyk, Reyna
